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distinguishes TGM from other component heater manufacturers Our focus
is building a turnkey Sublimation Prevention System
that is measured, designed, and field installed by our engineering team.
Pyewch®
SPS patented technology sets a new benchmark for thermal safety, efficiency,
and reliability.
Pyewch
Concept
Pyewch® is a system of custom heated removable insulation jackets
designed to meet your specific needs for controlled heat. Measured-Engineered-Installed,
The Pyewch® system is a comprehensive turnkey solution
- Pyewch® is
unique, in that it senses and controls the pipe temperature
- Our covers have
a well-insulated core that is 'Cool to the Touch’
- We use an ultra-clean
silicone jacket that is durable
and waterproof.
- The low profile
jumpers are constructed using military type connectors that are extremely
rugged, and
moisture resistant when mated.
- Power indicator
lights will immediately identify a problem.
- Pyewch® efficient
design operates on ultra-low power consumption.
Safety is
an important part of the Pyewch® system
Your safety is important to us. That is why we have included as many
safety features as possible and will continue to shape our product design
around safety
- Each heater jacket
has built in over-temp protection to prevent any run away condition.
- Each heater jacket
has an integral ground plane over the heating element just in case
a cover is accidentally cut or punctured.
- GFCI (Ground
Fault Circuit Interrupters) with 5mA trip are standard and built into
our multi-zone control cabinets and cord set model is used with single
zone units.
- Pyewch® exterior
surface temperatures are well below personnel protection standards
and exceed the SEMI S2-93, ASTM C1055,
and the US Navy MILSPEC-769 guidelines.
Gas
Supply Lines
Certain gases used to convey dopants that are deposited on the
wafer surface require heat. Constant moisture free gas flow is important.
Included in this category are SiH2Cl2, BCL3, C5F8, and WF6. These gas
delivery lines are heated using electric heat trace and insulation.
We have found that
controlling the temperature in incremental zones from the gas source
to the mass flow valve in the tool produces the best results.
©
2001 TGM Incorporated, all rights reserved.
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